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Proceedings Article

Light scattering from binary optics

[+] Author Affiliations
Douglas W. Ricks

Naval Weapons Ctr. (USA)

Larry V. Chizek

Naval Postgraduate School (USA)

Proc. SPIE 1211, Computer and Optically Formed Holographic Optics, 24 (May 1, 1990); doi:10.1117/12.17925
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From Conference Volume 1211

  • Computer and Optically Formed Holographic Optics
  • Ivan Cindrich; Sing H. Lee
  • Los Angeles, CA | January 14, 1990

abstract

Current pattern data formats for electron beam lithography are specifically designed to meet the needs of the VLSI industry. As a result, pattern data file size is often the limiting factor in the production of a binary computer generated hologram and not the spatial bandwidth product. This paper explores one alternate pattern data format that facilitates the full utilization of the e-beam machine's spatial bandwidth product without introducing prohibitive amounts of pattern data. The pattern data format uses two well established data compression techniques specifically tailored to remove the redundancies present in holographic fringe patterns.

© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Douglas W. Ricks and Larry V. Chizek
"Light scattering from binary optics", Proc. SPIE 1211, Computer and Optically Formed Holographic Optics, 24 (May 1, 1990); doi:10.1117/12.17925; http://dx.doi.org/10.1117/12.17925


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