Paper
1 May 1990 Diffraction efficiency of binary optical elements
J. Allen Cox, Thomas R. Werner, James C. Lee, Scott A. Nelson, Bernard S. Fritz, James W. Bergstrom
Author Affiliations +
Abstract
We examine the role of processing errors on diffraction efficiency of binary optical elements and the validity of the Fourier model to predict diffraction efficiency. We show that mask alignment error can significantly degrade efficiency. Models based on the Fourier theory can adequately predict both the magnitude of diffraction efficiency and its sensitivity to processing errors for optically slow elements (f/b). For optically fast elements (
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Allen Cox, Thomas R. Werner, James C. Lee, Scott A. Nelson, Bernard S. Fritz, and James W. Bergstrom "Diffraction efficiency of binary optical elements", Proc. SPIE 1211, Computer and Optically Formed Holographic Optics, (1 May 1990); https://doi.org/10.1117/12.17953
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Cited by 41 scholarly publications.
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KEYWORDS
Diffraction

Optical components

Fourier theory

Binary data

Etching

Photomasks

Holography

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