Highest-power excimer lasers

Elmar Mueller-Horsche; Peter Oesterlin; Dirk Basting

doi:10.1117/12.18480

1 June 1990 Highest-power excimer lasers

Elmar Mueller-Horsche, Peter Oesterlin, Dirk Basting

Proceedings Volume 1225, High-Power Gas Lasers; (1990) https://doi.org/10.1117/12.18480
Event: OE/LASE '90, 1990, Los Angeles, CA, United States

Abstract

A historical overview over the development of excimer lasers into the multi-100 Watt range is given. Special emphasis is on efforts in Japan and Europe concerning excimer lasers with an average power exceeding 1 kilowatt. The overview includes a discussion of the different excitation mechanisms.

Citation Download Citation

Elmar Mueller-Horsche, Peter Oesterlin, and Dirk Basting "Highest-power excimer lasers", Proc. SPIE 1225, High-Power Gas Lasers, (1 June 1990); https://doi.org/10.1117/12.18480

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