Multisensorial approach to the reconstruction of true surface topographies from SEM images

Wolfgang Beil; Ingwer C. Carlsen

doi:10.1117/12.19539

1 May 1990 Multisensorial approach to the reconstruction of true surface topographies from SEM images

Wolfgang Beil, Ingwer C. Carlsen

Proceedings Volume 1245, Biomedical Image Processing; (1990) https://doi.org/10.1117/12.19539
Event: Electronic Imaging: Advanced Devices and Systems, 1990, Santa Clara, CA, United States

Abstract

The computational reconstruction of surface topographies from Scanning Electron Microscope (SEM) images has been extensively investigated in the past but still fundamental image processing problems remain. Since conventional approaches adapted from general purpose image processing have not sufficiently met the requirements in terms of resolution and reliability the idea came up, to combine different methods to obtain better results. Stereoscopy evaluates stereo pairs of images to determine the three-dimensional surface topography for those parts in the image showing sufficient texture. This provides very accurate depth information since precisely known geometrical relations are involved to determine depth from perspective shift. 'Shape from shading' determines the three-dimensional surface orientation by the analysis of the local surface luminosity of the specimen. In this way 'shape from shading' provides additional depth information allowing to detect false stereo matches and to fill the gaps between the stereo data with true topographical information. Results will be presented showing how a combined analysis of multi-sensorial data yields improvements of the reconstructed surface topography which could not be obtained from the individual sensor signals alone.

Citation Download Citation

Wolfgang Beil and Ingwer C. Carlsen "Multisensorial approach to the reconstruction of true surface topographies from SEM images", Proc. SPIE 1245, Biomedical Image Processing, (1 May 1990); https://doi.org/10.1117/12.19539

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KEYWORDS

Image processing

Sensors

Image resolution

Biomedical optics

Signal detection

Scanning electron microscopy

3D image processing

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