Program package for the ellipsometry of inhomogeneous layers

Alexander V. Tikhonravov; Michael K. Trubetskov

doi:10.1117/12.163546

2 November 1993 Program package for the ellipsometry of inhomogeneous layers

Alexander V. Tikhonravov, Michael K. Trubetskov

Proceedings Volume 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings; (1993) https://doi.org/10.1117/12.163546
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

In this work we describe ellipsometric software that has been developed at Moscow State University. This software is based on the assurance that hierarchy of models should be used for the thin film. The hierarchy of layer models and the concept of the model being in the agreement with the accuracy of experimental data are discussed.

Citation Download Citation

Alexander V. Tikhonravov and Michael K. Trubetskov "Program package for the ellipsometry of inhomogeneous layers", Proc. SPIE 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, (2 November 1993); https://doi.org/10.1117/12.163546

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