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Proceedings Article

Program package for the ellipsometry of inhomogeneous layers

[+] Author Affiliations
Alexander V. Tikhonravov, Michael K. Trubetskov

Moscow State Univ. (Russia)

Proc. SPIE 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, 167 (November 2, 1993); doi:10.1117/12.163546
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From Conference Volume 2046

  • Inhomogeneous and Quasi-Inhomogeneous Optical Coatings
  • Jerzy A. Dobrowolski; Pierre G. Verly
  • Quebec City, Canada | August 16, 1993

abstract

In this work we describe ellipsometric software that has been developed at Moscow State University. This software is based on the assurance that hierarchy of models should be used for the thin film. The hierarchy of layer models and the concept of the model being in the agreement with the accuracy of experimental data are discussed.

© (1993) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Alexander V. Tikhonravov and Michael K. Trubetskov
"Program package for the ellipsometry of inhomogeneous layers", Proc. SPIE 2046, Inhomogeneous and Quasi-Inhomogeneous Optical Coatings, 167 (November 2, 1993); doi:10.1117/12.163546; http://dx.doi.org/10.1117/12.163546


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