Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Scattering and coherence in EUVL

[+] Author Affiliations
Tomas D. Milster, Neil A. Beaudry

Optical Sciences Ctr./Univ. of Arizona (USA)

Proc. SPIE 3331, Emerging Lithographic Technologies II, 537 (June 5, 1998); doi:10.1117/12.309613
Text Size: A A A
From Conference Volume 3331

  • Emerging Lithographic Technologies II
  • Yuli Vladimirsky
  • Santa Clara, CA | February 22, 1998

abstract

We illustrate the importance of considering scattering from the illuminator in extreme UV lithography systems. Our results indicate that a significant amount of amplitude modulation noise is present in the aerial image if scatter is present in a Koehler illuminator. The effect depends on the spatial frequency of the pattern on the mask, the numerical aperture of the projection camera, the coherence factor, and placement of the plane in the illuminator where the scattering occurs.

© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Tomas D. Milster and Neil A. Beaudry
"Scattering and coherence in EUVL", Proc. SPIE 3331, Emerging Lithographic Technologies II, 537 (June 5, 1998); doi:10.1117/12.309613; http://dx.doi.org/10.1117/12.309613


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.