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Proceedings Article

Design and study of water-soluble positive- and negative-tone imaging materials

[+] Author Affiliations
Jennifer M. Havard, Dario Pasini, Jean M. J. Frechet

Univ. of California/Berkeley (USA)

David R. Medeiros, Kyle Patterson, Shintaro Yamada, C. Grant Willson

Univ. of Texas/Austin (USA)

Proc. SPIE 3333, Advances in Resist Technology and Processing XV, 111 (June 29, 1998); doi:10.1117/12.312351
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From Conference Volume 3333

  • Advances in Resist Technology and Processing XV
  • Will Conley
  • Santa Clara, CA | February 22, 1998

abstract

The interest in imaging materials with improved environmental characteristics has led us to consider imaging formulations coated from and developed in aqueous media, thus avoiding the need for both organic solvents and basic aqueous developer solutions. We have previously reported on the design of several negative-tone resists operating via radiation-induced crosslinking, and while the performance of these negative-tone systems met our basic goals, the resolution that could be achieved was limited due to swelling occurring during development. We now report on various other designs based on polyoxazoline, poly(vinyl alcohol), and methacrylate resins that circumvent this problem with approaches towards both negative- and positive- tone systems.

© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Topics

Radiation ; Water
Citation

Jennifer M. Havard ; Dario Pasini ; Jean M. J. Frechet ; David R. Medeiros ; Kyle Patterson, et al.
"Design and study of water-soluble positive- and negative-tone imaging materials", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, 111 (June 29, 1998); doi:10.1117/12.312351; http://dx.doi.org/10.1117/12.312351


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