For high power laser applications, extinction coefficients and refractive indices of ion beam sputtered
resp. ionplated Hf02-, Si02- and A1203- films were determined by spectrophotometric analysis in the wavelength
range between 200 and 500 nm. Film qualities were related to the corresponding process parameters. Qualitative
information about water content has been obtained by infrared spectroscopy. Impurities and film stoichiometry
were determined by RBS analysis. Laser induced damage thresholds were measured with a (KrF*)excimer laser
at 248 nm. The tested samples were single layers as well as high reflecting QWOT stacks. All results were
compared with the corresponding values of e-beam coatings.© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.