Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Laser-induced damage thresholds and optical constants of ion-plated and ion-beam-sputtered Al2O3 and HfO2 coatings for the ultraviolet

[+] Author Affiliations
Alexandra Starke

Technische Univ. Berlin (Germany)

Harald Schink, Jurgen Kolbe, Johanes Ebert

Univ. Hannover (Germany)

Proc. SPIE 1270, Optical Thin Films and Applications, 299 (August 1, 1990); doi:10.1117/12.20391
Text Size: A A A
From Conference Volume 1270

  • Optical Thin Films and Applications
  • Reinhard Herrmann
  • The Hague, Netherlands | March 01, 1990

abstract

For high power laser applications, extinction coefficients and refractive indices of ion beam sputtered resp. ionplated Hf02-, Si02- and A1203- films were determined by spectrophotometric analysis in the wavelength range between 200 and 500 nm. Film qualities were related to the corresponding process parameters. Qualitative information about water content has been obtained by infrared spectroscopy. Impurities and film stoichiometry were determined by RBS analysis. Laser induced damage thresholds were measured with a (KrF*)excimer laser at 248 nm. The tested samples were single layers as well as high reflecting QWOT stacks. All results were compared with the corresponding values of e-beam coatings.

© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Alexandra Starke ; Harald Schink ; Jurgen Kolbe and Johanes Ebert
"Laser-induced damage thresholds and optical constants of ion-plated and ion-beam-sputtered Al2O3 and HfO2 coatings for the ultraviolet", Proc. SPIE 1270, Optical Thin Films and Applications, 299 (August 1, 1990); doi:10.1117/12.20391; http://dx.doi.org/10.1117/12.20391


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.