Characterizing the absorption and aging behavior of DUV optical material by high-resolution excimer laser calorimetry

Klaus R. Mann; Eric Eva

doi:10.1117/12.310736

29 June 1998 Characterizing the absorption and aging behavior of DUV optical material by high-resolution excimer laser calorimetry

Klaus R. Mann, Eric Eva

Author Affiliations +

Proceedings Volume 3334, Optical Microlithography XI; (1998) https://doi.org/10.1117/12.310736
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

Absorption loss in DUV optics during 193 nm irradiation is investigated by employing a high-resolution calorimetric technique which allows determining both single and two photon absorption coefficients at energy densities of several 10 mJ/cm², avoiding a significant thermal load on the samples. UV calorimetry is also employed to investigate laser induced aging phenomena, e.g. color center formation in fused silica or CaF₂. A separation of transient and cumulative effects as a function of intensity can be achieved, giving insight into various loss mechanisms. Moreover, the influence of dielectric coatings on the absorption characteristics is discussed.

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Klaus R. Mann and Eric Eva "Characterizing the absorption and aging behavior of DUV optical material by high-resolution excimer laser calorimetry", Proc. SPIE 3334, Optical Microlithography XI, (29 June 1998); https://doi.org/10.1117/12.310736

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