Differential reflection spectroscopy: a versatile modulation technique for the study of the electronic properties of alloys, semiconductors, and thin films

Rolf E. Hummel

doi:10.1117/12.20846

1 August 1990 Differential reflection spectroscopy: a versatile modulation technique for the study of the electronic properties of alloys, semiconductors, and thin films

Rolf E. Hummel

Author Affiliations +

Proceedings Volume 1286, Modulation Spectroscopy; (1990) https://doi.org/10.1117/12.20846
Event: Advances in Semiconductors and Superconductors: Physics Toward Devices Applications, 1990, San Diego, CA, United States

Abstract

Differential Reflection Spectrometry utilizes two almost identical samples which are mounted stationary, side by side. The samples differe slightly in their surface properties, for example, in composition, crystal structure, etc. Unpolarized light is alternately deflected to one or the other specimen by means of a vibrating mirror. Electronic processing yields the difference in the reflectivities, that is, a first derivative-like spectrum. Examples for applications are given, such as in situ studies of corrosion and passivation in aqueous solutions, investigations of alloys, and studies of the fmer details of implantation damage in semiconducting materials.

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Rolf E. Hummel "Differential reflection spectroscopy: a versatile modulation technique for the study of the electronic properties of alloys, semiconductors, and thin films", Proc. SPIE 1286, Modulation Spectroscopy, (1 August 1990); https://doi.org/10.1117/12.20846

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