Laser-annealed Fabry-Perot fiber optic temperature sensor

Jorge L. Sotomayor; Glenn Beheim

doi:10.1117/12.169926

9 March 1994 Laser-annealed Fabry-Perot fiber optic temperature sensor

Jorge L. Sotomayor, Glenn Beheim

Proceedings Volume 2070, Fiber Optic and Laser Sensors XI; (1994) https://doi.org/10.1117/12.169926
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

A fiber-optic temperature sensor has been fabricated by first sputtering a silicon film onto the end of an optical fiber. The approximately one-micrometer thick silicon film serves as a Fabry-Perot etalon whose resonant wavelengths change as a function of temperature. The silicon film is annealed in order to stabilize its structure. This will provide a sensor with acceptable long term stability. The use of wavelength encoding fiber optic sensors provides a high degree of immunity from cable and connector effects. The benefits of this technology include reduced volume and weight, reduced cost, and improved reliability.

Citation Download Citation

Jorge L. Sotomayor and Glenn Beheim "Laser-annealed Fabry-Perot fiber optic temperature sensor", Proc. SPIE 2070, Fiber Optic and Laser Sensors XI, (9 March 1994); https://doi.org/10.1117/12.169926

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