Paper
1 February 1994 Confocal operation in differential phase interference microscopy
Michael G. Somekh, R. D. Holmes, Roland K. Appel, Chung Wah See
Author Affiliations +
Abstract
This paper discusses the operation and imaging properties of various types of optical heterodyne interferometer. Conditions needed to achieve confocality in differential interference microscopes are considered. This leads to a novel extended focus phase imaging mode. Results are presented which demonstrate this mode of operation and show the ability of the technique to produce accurate phase measurement on samples with warp and tilt, over a range much greater than the depth of focus of the objective lens.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael G. Somekh, R. D. Holmes, Roland K. Appel, and Chung Wah See "Confocal operation in differential phase interference microscopy", Proc. SPIE 2083, Microscopy, Holography, and Interferometry in Biomedicine, (1 February 1994); https://doi.org/10.1117/12.167432
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KEYWORDS
Confocal microscopy

Microscopes

Imaging systems

Heterodyning

Line scan image sensors

Phase imaging

Interferometers

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