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Proceedings Article

Imaging polarimeters for optical metrology

[+] Author Affiliations
J. Larry Pezzaniti, Russell A. Chipman

Univ. of Alabama in Huntsville (USA)

Proc. SPIE 1317, Polarimetry: Radar, Infrared, Visible, Ultraviolet, and X-Ray, 280 (October 1, 1990); doi:10.1117/12.22065
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From Conference Volume 1317

  • Polarimetry: Radar, Infrared, Visible, Ultraviolet, and X-Ray
  • Russell A. Chipman; John W. Morris
  • Orlando, United States | April 16, 1990

abstract

Two configurations of imaging polarimeters are described that are designed for polaimetric optical metrology. The first is a Stokes imaging polarimeter which measures the polarization response of optical systems to spherical or planar waves of known polarization. The output is images of the degree of polarization, orientation, and eccentricity of polarization ellipses, or Stokes parameters displayed as a function of either the exit pupil or image coordinate of the optical system. The second configuration is a Mueller imaging polarimeter which measures the Mueller matrix of an optical system on a ray-by-ray basis. Calibration issues involved in building the instruments are addressed along with a brief discussion on polarization aberration mechanisms.

© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

J. Larry Pezzaniti and Russell A. Chipman
"Imaging polarimeters for optical metrology", Proc. SPIE 1317, Polarimetry: Radar, Infrared, Visible, Ultraviolet, and X-Ray, 280 (October 1, 1990); doi:10.1117/12.22065; http://dx.doi.org/10.1117/12.22065


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