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We show a system for sequential distance measurement which works as a 3D-sensor. One point of the object is illuminated via an xy-scanning-system. The scattered wave carries the distance information in its curvature at the location of the sensor. We collinearly measure the radius of this wave in the sensor plane by shearing interferometry. Heterodyne modulation of the interference pattern is performed by a photoelastic modulator for high speed and robustness against environmental light. The sensor requires very small apertures for illumination and detection so shading effects and hidden points are minimized. 2.
Gerd Haeusler andHans Weissmann
"Acquisition of 3-D data by a heterodyne shearing interferometer with photoelastic modulation", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34740
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Gerd Haeusler, Hans Weissmann, "Acquisition of 3-D data by a heterodyne shearing interferometer with photoelastic modulation," Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34740