Dense, water-free magnesium and calcium fluoride films were produced by Reactive Ion Beam
Sputtering (RIBS). These films were found to J.e fluorine deficient because of a preferential
sputtering of fluorine at the target This deficiency was eliminated by the addition of a fluorinecontaining
gas (carbon tetrafluoride) to the coating chamber gases during deposition of the films.
The chemical composition and density of the films were measured with Rutherford backscattering
spectrometry. The relationship between film composition and optical properties was investigated.
The results indicate that the fluorine deficiency can be eliminated without compromising either the
density or environmental durability.© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.