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Proceedings Article

Characterization of optical blacks by infrared ellipsometry and reflectometry

[+] Author Affiliations
Soe-Mie F. Nee, Harold E. Bennett

Naval Weapons Ctr. (USA)

Proc. SPIE 1331, Stray Radiation in Optical Systems, 249 (December 1, 1990); doi:10.1117/12.22660
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From Conference Volume 1331

  • Stray Radiation in Optical Systems
  • Robert P. Breault
  • San Diego, CA | July 01, 1990

abstract

The reflectance and the ellipsometric parameters for two black samples were measured at 5-j.tm wavelength and at multiple incident angles using an ellipsometer. Different models were used to reduce the ellipsometric data and to calculate the reference specular reflectance. With the correct model, the measured reflectance and the near-angle scattering with respect to the reference specular reflectance can agree with Beckmann's scattering theory. The roughness reduced from reflectometry is independent of ellipsometric models and is used to select the correct set of solutions. A three-phase model in which the complex dielectric constant is computed from Bruggeman's effective medium theory can provide consistent solutions between roughness from reflectometry and effective thickness from ellipsometry. A combination of ellipsometry, reflectometry, and scatterometry can predict accurately the complex index of refraction, roughness, and other optical properties of black samples.

© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Soe-Mie F. Nee and Harold E. Bennett
"Characterization of optical blacks by infrared ellipsometry and reflectometry", Proc. SPIE 1331, Stray Radiation in Optical Systems, 249 (December 1, 1990); doi:10.1117/12.22660; http://dx.doi.org/10.1117/12.22660


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