The use of the phase shifting interferometric technique is discussed to make quantitative surface profiling
using the Nomarski differential interference microscope. Lateral shift of the Nomarski prism introduces
mutual phase shift between interfering two wavefronts with small amount of shear. Since the analyzed
phase distribution corresponds to the differential of the surface profile under test, integration of the phase
distribution gives the correct surface topography. The procedure for an analysis method and experimental
results are presented.© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.