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Proceedings Article

Review of phase-measuring interferometry

[+] Author Affiliations
H. Philip Stahl

Stahl Optical Systems and Rose-Hulman Institute of Technolog (USA)

Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, 704 (January 1, 1991); doi:10.1117/12.51121
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From Conference Volume 1332

  • Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
  • Chander P. Grover
  • San Diego, CA | July 01, 1990

abstract

The theory and practice of phase-measuring interferometry (PMI) are reviewed. The phase measurement algorithms are discussed and phase modulation and wavefront reconstruction are examined as part of the implementation of PMI. The performance limitations of PMI are addressed.

© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

H. Philip Stahl
"Review of phase-measuring interferometry", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, 704 (January 1, 1991); doi:10.1117/12.51121; http://dx.doi.org/10.1117/12.51121


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