Stylus profilometry of large optics

William J. Wills-Moren; Peter B. Leadbeater

doi:10.1117/12.22803

1 November 1990 Stylus profilometry of large optics

William J. Wills-Moren, Peter B. Leadbeater

Proceedings Volume 1333, Advanced Optical Manufacturing and Testing; (1990) https://doi.org/10.1117/12.22803
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

There is a critical need for new metrology tools for bridging the gap between mechani cal profilometry and high-resolution Interterometry in the manufacture of advanced optical components. A new class of instruments is becoming available because of the rapid advances In laser diode technology. Properties of modern index-guIded laser diodes include wavelength tunability, multiple wavelength operation, excellent spatial coherence and low unit cost. These properties can be used for absolute distance measurement on polished and unpolished optical surfaces during fabrication.

Citation Download Citation

William J. Wills-Moren and Peter B. Leadbeater "Stylus profilometry of large optics", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); https://doi.org/10.1117/12.22803

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