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Proceedings Article

Stylus profilometry of large optics

[+] Author Affiliations
William J. Wills-Moren, Peter B. Leadbeater

Cranfield Precision Engineering Ltd. (United Kingdom)

Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, 183 (November 1, 1990); doi:10.1117/12.22803
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From Conference Volume 1333

  • Advanced Optical Manufacturing and Testing
  • Gregory M. Sanger; Paul B. Reid; Lionel R. Baker
  • San Diego, CA | July 01, 1990

abstract

There is a critical need for new metrology tools for bridging the gap between mechani cal profilometry and high-resolution Interterometry in the manufacture of advanced optical components. A new class of instruments is becoming available because of the rapid advances In laser diode technology. Properties of modern index-guIded laser diodes include wavelength tunability, multiple wavelength operation, excellent spatial coherence and low unit cost. These properties can be used for absolute distance measurement on polished and unpolished optical surfaces during fabrication.

© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

William J. Wills-Moren and Peter B. Leadbeater
"Stylus profilometry of large optics", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, 183 (November 1, 1990); doi:10.1117/12.22803; http://dx.doi.org/10.1117/12.22803


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