Laser diode technologies for in-process metrology

Peter J. de Groot

doi:10.1117/12.22804

1 November 1990 Laser diode technologies for in-process metrology

Peter J. de Groot

Proceedings Volume 1333, Advanced Optical Manufacturing and Testing; (1990) https://doi.org/10.1117/12.22804
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Measurement of an optical surface by a figure measuring device allows one to make an estimate of the shape of the surface. The absolute accuracy in locating the "true" surface depends on the sources of error in the measurement process - both random errors and systematic errors. Analysis procedures have been developed to extract surface figure information from optical profiler measurements on large mirrors. Rigid-body orientation effects are important in analyzing the shape of the off-axis ellipsoidal reflectors used as grazing incidence mirrors in soft-x-ray synchrotron instrumentation. Knowledge of the noise level and optical aberration function of the Long Trace Profiler allow us to place error bars smaller than lambda/100 on measurements of surfaces that are more than 500mm long.

Citation Download Citation

Peter J. de Groot "Laser diode technologies for in-process metrology", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); https://doi.org/10.1117/12.22804

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