InGaAs/GaAs interdigitated metal-semiconductor-metal (IMSM) photodetectors operational at 1.3 um grown by molecular beam epitaxy

Boris S. Elman; Jagannath Chirravuri; A. N. M. Masu Choudhury; Andrew Silletti; Andrew J. Negri; J. Powers

doi:10.1117/12.24540

1 February 1991 InGaAs/GaAs interdigitated metal-semiconductor-metal (IMSM) photodetectors operational at 1.3 um grown by molecular beam epitaxy

Boris S. Elman, Jagannath Chirravuri, A. N. M. Masu Choudhury, Andrew Silletti, Andrew J. Negri, J. Powers

Author Affiliations +

Proceedings Volume 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications; (1991) https://doi.org/10.1117/12.24540
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications, 1990, Aachen, Germany

Abstract

The paper reports on InGaAs interdigitated metal-semiconductor-metal (IMSM) photodetectors operational at 13 micron fabricated on GaAs substrates. Different Schottky barrier enhancement cap layers were used in order to study the thermal stability and device performance characteristics. Dark current, dc responsivity, and high frequency response results are reported. Relationship between the responsivity and the cap structure is discussed. Using oxygen plasma passivation, photodetectors with low dark current and high frequency performance were obtained.

Citation Download Citation

Boris S. Elman, Jagannath Chirravuri, A. N. M. Masu Choudhury, Andrew Silletti, Andrew J. Negri, and J. Powers "InGaAs/GaAs interdigitated metal-semiconductor-metal (IMSM) photodetectors operational at 1.3 um grown by molecular beam epitaxy", Proc. SPIE 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications, (1 February 1991); https://doi.org/10.1117/12.24540

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available