Surface topometry by multiwavelength technique and temporal Fourier transformation

Hans J. Tiziani; Bernhard Franze; Pascal Haible; Charles Joenathan

doi:10.1117/12.323299

29 September 1998 Surface topometry by multiwavelength technique and temporal Fourier transformation

Hans J. Tiziani, Bernhard Franze, Pascal Haible, Charles Joenathan

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323299
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

Absolute interferometry can be a powerful tool for distance and shape measurement. Two and more wavelengths can be used to increase the range of unambiguity in interferometry. Furthermore it leads to the possibility to apply interferometric methods to measure optical rough surfaces. A continuously tunable laser in a two beam unequal path interferometer is used to overcome the ambiguity problem of classical interferometric methods. While the laser wavelength is tuned continuously, the variation of the interference intensity is recorded sequentially. At each image pixel the frequency of the signal modulation is analyzed, giving the absolute depth information for the corresponding object point. The wavelength tuning step governs the depth of measurement whereas the tuning range determines the depth resolution to be obtained. The method can be applied for optical as well as for technical surfaces. In the latter case, the intensity variation is observed independently in each speckle. However, the resolution of the measurement of optically rough surfaces is limited by the surface roughness. The continuous tuning of the wavelengths is performed with a diode laser with external cavity where a frequency variation of 30 nm can be obtained without mode hops within one second. Furthermore a novel method to measure the shape and steps heights by rotating the object and using temporal evaluation of the speckles' modulation is presented. Currently a temporal Fourier- transformation is used, similar to the evaluation method used in wavelength scanning interferometry.

Citation Download Citation

Hans J. Tiziani, Bernhard Franze, Pascal Haible, and Charles Joenathan "Surface topometry by multiwavelength technique and temporal Fourier transformation", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323299

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