Digital shearography for slope measurement

Huai Min Shang; Y. M. He; Cho Jui Tay

doi:10.1117/12.323331

29 September 1998 Digital shearography for slope measurement

Huai Min Shang, Y. M. He, Cho Jui Tay

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323331
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

This paper presents an electronic speckle shearing interferometry optical method for the full field measurement of the slope of an object. The object under study is placed on a rotatable platform and illuminated by an expanded laser beam. Its image is recorded by a shearing CCD camera and stored directly into a computer. By recording the two images before and after giving the object a small angle of rotation, the resulting correlation fringe pattern which represents the object surface slope can be obtained. Theory of the new method and some experimental results are presented.

Citation Download Citation

Huai Min Shang, Y. M. He, and Cho Jui Tay "Digital shearography for slope measurement", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323331

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