Fiber optical single-frame speckle interferometer for measuring industrial surfaces

Jochen Kranz; Juergen Lamprecht; Andrea Hettwer; Johannes Schwider

doi:10.1117/12.323335

29 September 1998 Fiber optical single-frame speckle interferometer for measuring industrial surfaces

Jochen Kranz, Juergen Lamprecht, Andrea Hettwer, Johannes Schwider

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323335
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

Speckle interferometry is a sophisticated technique for the non-contact, high precision measurement of form, deformation and vibration of technical surfaces. In this paper, a new single frame phase-shifting speckle interferometer for the quantitative measurement of out-of-plane-deformations is described and first measurements are presented. With a binary phase grating, six interference patterns are generated at a time. They are acquired within one frame time of a single CCD- camera, thus minimizing errors due to thermal fluctuations or vibrations. The use of fiber optics allows a flexible application of the system under industrial conditions and a compact design of the sensor head.

Citation Download Citation

Jochen Kranz, Juergen Lamprecht, Andrea Hettwer, and Johannes Schwider "Fiber optical single-frame speckle interferometer for measuring industrial surfaces", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323335

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