Scanning optical microscopy and its applications to nondestructive materials testing

Peter Torok; L. Mule Stagno

doi:10.1117/12.323349

29 September 1998 Scanning optical microscopy and its applications to nondestructive materials testing

Peter Torok, L. Mule Stagno

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323349
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

In this work we discuss the applications of confocal microscopy to non-destructive materials testing. After the introduction we briefly consider some important theoretical aspects of the microscope. We then move to discuss the possible imaging modes available for both surface and bulk microscopy. We present experimental images obtained with various types of imaging modes. Finally, an experimental confirmation for the theoretically predicted contrast mechanism is discussed.

Citation Download Citation

Peter Torok and L. Mule Stagno "Scanning optical microscopy and its applications to nondestructive materials testing", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323349

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