Integrated optic switches for phased-array applications based on electrostatic actuation of metallic membranes

Gregory A. Magel; Tseng-Hwang Lin; Lily Y. Pang; Wen-Rong Wu

doi:10.1117/12.177390

10 June 1994 Integrated optic switches for phased-array applications based on electrostatic actuation of metallic membranes

Gregory A. Magel, Tseng-Hwang Lin, Lily Y. Pang, Wen-Rong Wu

Author Affiliations +

Proceedings Volume 2155, Optoelectronic Signal Processing for Phased-Array Antennas IV; (1994) https://doi.org/10.1117/12.177390
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

Photonic ON/OFF and routing switches can be made using alterations of the modal effective index caused by changing the cladding on a dielectric waveguide. Drumhead-like aluminum membranes are formed electrostatically pulled into contact with the waveguides, with operating times of tens to hundreds of microseconds. An ON/OFF switch (or digital modulator) with an extinction ratio of 19 dB has been demonstrated using the change in the imaginary part of the effective index of a silicon nitride rib waveguide. Routing switches based on directional couplers are under development, and their feasibility has been demonstrated with a deposited (fixed) aluminum film. The switches are fabricated on silicon using VLSI-compatible processes, and can be used to select optical time delays for phased-array signal processing.

Citation Download Citation

Gregory A. Magel, Tseng-Hwang Lin, Lily Y. Pang, and Wen-Rong Wu "Integrated optic switches for phased-array applications based on electrostatic actuation of metallic membranes", Proc. SPIE 2155, Optoelectronic Signal Processing for Phased-Array Antennas IV, (10 June 1994); https://doi.org/10.1117/12.177390

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