Characteristics of heater film for ink-jet printhead

Sao-Ling Chiu; DongSing Wuu; Yi-Yung Wu

doi:10.1117/12.311104

18 June 1998 Characteristics of heater film for ink-jet printhead

Sao-Ling Chiu, DongSing Wuu, Yi-Yung Wu

Proceedings Volume 3422, Input/Output and Imaging Technologies; (1998) https://doi.org/10.1117/12.311104
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan

Abstract

In a thermal bubble inkjet printhead, thin film resistor plays the most important role. The thin film resistor must fire about 1 billion times during the device operation. During firing, temperatures are up to 400 degrees Celsius and the duration is on the order of microseconds. In this situation, the resistance stability and mechanical property of the thin film resistor are critical for fabrication. In this study, resistivity and stress behavior related to a wild range of Ta- Al compositions are examined.

Citation Download Citation

Sao-Ling Chiu, DongSing Wuu, and Yi-Yung Wu "Characteristics of heater film for ink-jet printhead", Proc. SPIE 3422, Input/Output and Imaging Technologies, (18 June 1998); https://doi.org/10.1117/12.311104

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