Design simulation and optimization of micro-optical components

Ingo Sieber; Horst Eggert; Helmut Guth; Wilfried Jakob

doi:10.1117/12.332468

8 December 1998 Design simulation and optimization of micro-optical components

Ingo Sieber, Horst Eggert, Helmut Guth, Wilfried Jakob

Proceedings Volume 3430, Novel Optical Systems and Large-Aperture Imaging; (1998) https://doi.org/10.1117/12.332468
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

Manufacturing test structures of microsystems and microcomponents is very expensive in terms of time and materials. In conventional design processes, this limits the number of design variants to be considered. For this reason, computer-supported design techniques are becoming more and more important in microsystems technology. The article describes a micro-optical structure as an example demonstrating the factors which disturb the operation of a micro-optical module, and derives a theoretical description of the system under consideration which allows the system parameters to be optimized with respect to the disturbing influences by means of an evolutionary search method.

Citation Download Citation

Ingo Sieber, Horst Eggert, Helmut Guth, and Wilfried Jakob "Design simulation and optimization of micro-optical components", Proc. SPIE 3430, Novel Optical Systems and Large-Aperture Imaging, (8 December 1998); https://doi.org/10.1117/12.332468

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