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Proceedings Article

Interferometer accuracy and precision

[+] Author Affiliations
Lars A. Selberg

Zygo Corp. (USA)

Proc. SPIE 1400, Optical Fabrication and Testing, 24 (March 1, 1991); doi:10.1117/12.26110
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From Conference Volume 1400

  • Optical Fabrication and Testing
  • Manfred Lorenzen; Duncan R. J. Campbell; Craig Johnson
  • Singapore | October 22, 1990

abstract

Several optical errors present in interferometer systems are examined in detail. Optical cavity errors are typically the primary limitation on measurement accuracy. Secondary sources of error include imaging distortion and ray-mapping (slope) errors. The effect of phase modulation/processing errors on precision is briefly discussed. Some on- site errors (operator technique and environmental effects) are also examined. Rules of thumb for error estimation are presented when applicable. Specific quantitative analysis is based on the Zygo MARK IVxp phase measuring interferometer.

© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Lars A. Selberg
"Interferometer accuracy and precision", Proc. SPIE 1400, Optical Fabrication and Testing, 24 (March 1, 1991); doi:10.1117/12.26110; http://dx.doi.org/10.1117/12.26110


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