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Proceedings Article

Stitching: high-spatial-resolution microsurface measurements over large areas

[+] Author Affiliations
Shouhong Tang

Phase Shift Technology Inc. (USA)

Proc. SPIE 3479, Laser Interferometry IX: Applications, 43 (July 6, 1998); doi:10.1117/12.316470
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From Conference Volume 3479

  • Laser Interferometry IX: Applications
  • Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner
  • San Diego, CA, USA | July 19, 1998

abstract

To achieve a measurement with high spatial resolution over a large area, we stitch together multiple high spatial resolution maps obtained from an interferometric microscope with or without a motorized stage. These maps have a high height precision and a lateral resolution as high as 0.11 micron/pixel. They can be stitched together with acceptable accuracy as long as each of their adjacent areas has enough overlapping pixels. The stitching technique we have developed is based on a computed probability that gives a quantitative measure for the goodness of the chi-square fitting. It is insensitive to the piston and tilt changes of each map. It is also insensitive to the lateral shift and/or rotation between the overlapping maps. This technique is robust and flexible. It is able to give a satisfactory measurement without relying on the accuracy of the stage movement. The map stitching expands the field of view available to an objective lens, which makes it possible to measure a large area without losing high-slope surface features.

© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Shouhong Tang
"Stitching: high-spatial-resolution microsurface measurements over large areas", Proc. SPIE 3479, Laser Interferometry IX: Applications, 43 (July 6, 1998); doi:10.1117/12.316470; http://dx.doi.org/10.1117/12.316470


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