Stitching: high-spatial-resolution microsurface measurements over large areas

Shouhong Tang

doi:10.1117/12.316470

6 July 1998 Stitching: high-spatial-resolution microsurface measurements over large areas

Shouhong Tang

Proceedings Volume 3479, Laser Interferometry IX: Applications; (1998) https://doi.org/10.1117/12.316470
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

To achieve a measurement with high spatial resolution over a large area, we stitch together multiple high spatial resolution maps obtained from an interferometric microscope with or without a motorized stage. These maps have a high height precision and a lateral resolution as high as 0.11 micron/pixel. They can be stitched together with acceptable accuracy as long as each of their adjacent areas has enough overlapping pixels. The stitching technique we have developed is based on a computed probability that gives a quantitative measure for the goodness of the chi-square fitting. It is insensitive to the piston and tilt changes of each map. It is also insensitive to the lateral shift and/or rotation between the overlapping maps. This technique is robust and flexible. It is able to give a satisfactory measurement without relying on the accuracy of the stage movement. The map stitching expands the field of view available to an objective lens, which makes it possible to measure a large area without losing high-slope surface features.

Citation Download Citation

Shouhong Tang "Stitching: high-spatial-resolution microsurface measurements over large areas", Proc. SPIE 3479, Laser Interferometry IX: Applications, (6 July 1998); https://doi.org/10.1117/12.316470

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