Phase correction for coated-pole-tip recession measurement

Sen Han

doi:10.1117/12.316440

6 July 1998 Phase correction for coated-pole-tip recession measurement

Sen Han

Proceedings Volume 3479, Laser Interferometry IX: Applications; (1998) https://doi.org/10.1117/12.316440
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

In the Pole Tip Recession (PTR) measurement using a Phase Shifting Interferometer (PSI), the phase shift due to the reflection at the air/thin film/dissimilar substrate interfaces will certainly cause incorrect PTR measurement. In this paper the effects of the variations in the refractive index of the materials and of coating thickness on the PTR measurement have been analyzed, and the PTR offsets and their errors have been calculated.

Citation Download Citation

Sen Han "Phase correction for coated-pole-tip recession measurement", Proc. SPIE 3479, Laser Interferometry IX: Applications, (6 July 1998); https://doi.org/10.1117/12.316440

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