Photoinscribed waveguides, devices, and gratings in polyglass on silicon

Tahar Touam; Rahmani Sara; Mark P. Andrews; S. Iraj Najafi

doi:10.1117/12.321985

21 September 1998 Photoinscribed waveguides, devices, and gratings in polyglass on silicon

Tahar Touam, Rahmani Sara, Mark P. Andrews, S. Iraj Najafi

Proceedings Volume 3482, International Optical Design Conference 1998; (1998) https://doi.org/10.1117/12.321985
Event: International Optical Design Conference, 1998, Kona, HI, United States

Abstract

We report on design, fabrication and characterization of channel waveguides, star couplers, gratings and dense wavelength division multiplexers imprinted by an ultraviolet lamp and an excimer laser in polyglass on silicon prepared by a low temperature sol-gel process.

Citation Download Citation

Tahar Touam, Rahmani Sara, Mark P. Andrews, and S. Iraj Najafi "Photoinscribed waveguides, devices, and gratings in polyglass on silicon", Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); https://doi.org/10.1117/12.321985

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