Microscanning system for laser applications

Jan Bechtle; H. Grateau; Pierre Labeye; P. Bezesty; Karine Petroz

doi:10.1117/12.321987

21 September 1998 Microscanning system for laser applications

Jan Bechtle, H. Grateau, Pierre Labeye, P. Bezesty, Karine Petroz

Proceedings Volume 3482, International Optical Design Conference 1998; (1998) https://doi.org/10.1117/12.321987
Event: International Optical Design Conference, 1998, Kona, HI, United States

Abstract

We have developed an integrated system for laser beam deflection, using a monolithic silica on silicon structure including microlenses and an electromechanical actuator. The scanner shows a maximum deflection angle of +/- 5 degree(s) for a static Voltage of about 130 V or continuous scanning of a field of 20 degree(s) for a 45 V signal at the resonance frequency. The device is fabricated by a surface micromachining process of a silica layer on silicon substrate with no subsequent assembling steps involved.

Citation Download Citation

Jan Bechtle, H. Grateau, Pierre Labeye, P. Bezesty, and Karine Petroz "Microscanning system for laser applications", Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); https://doi.org/10.1117/12.321987

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