Direct synthesis of metal nitride by CO2 or XeCl laser-plasma

Chantal Boulmer-Leborgne; A. L. Thomann; Joerg Hermann

doi:10.1117/12.184757

7 September 1994 Direct synthesis of metal nitride by CO₂ or XeCl laser plasma

Chantal Boulmer-Leborgne, A. L. Thomann, Joerg Hermann

Proceedings Volume 2207, Laser Materials Processing: Industrial and Microelectronics Applications; (1994) https://doi.org/10.1117/12.184757
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria

Abstract

The present work deals with a new nitriding method applied to titanium: the Ti surface nitriding is carried out by direct laser irradiation in the presence of ambient nitrogen. The experimental procedure is performed in a chamber containing N₂ gas, allowing plasma study by emission spectroscopy. Two pulsed laser types are used, a TEA-CO₂ ((lambda) equals 10.6 micrometers ) and a XeCl excimer ((lambda) equals 308 nm) in order to compare the laser- material coupling influence on the layer synthesis process. The laser beam is focused perpendicularly to the Ti samples. Different experimental conditions are achieved to investigate the influence of laser and gas parameters on the process. Using the CO₂ laser, a N₂ plasma is created on the Ti surface. With the XeCl excimer laser, a Ti plasma on the sample appears. After treatment, the surface state of the samples is studied and chemical analysis of the targets are carried out. The TiN synthesis is evidenced. Presence of oxinitride in the compound and native surface oxygen reduction by hydrogen plasma are examined.

Citation Download Citation

Chantal Boulmer-Leborgne, A. L. Thomann, and Joerg Hermann "Direct synthesis of metal nitride by CO₂ or XeCl laser plasma", Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); https://doi.org/10.1117/12.184757

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