Fabrication of Fresnel lenses and other optical elements with the help of inorganic resists

Alexander V. Stronski; Peter E. Schepeljavi; Sergey A. Kostyukevych; Peter F. Romanenko; Igor Iosifovitc Robur; Ivan Z. Indutnyi

doi:10.1117/12.180953

28 July 1994 Fabrication of Fresnel lenses and other optical elements with the help of inorganic resists

Alexander V. Stronski, Peter E. Schepeljavi, Sergey A. Kostyukevych, Peter F. Romanenko, Igor Iosifovitc Robur, Ivan Z. Indutnyi

Author Affiliations +

Proceedings Volume 2213, Nanofabrication Technologies and Device Integration; (1994) https://doi.org/10.1117/12.180953
Event: Integrated Optoelectronics '94, 1994, Lindau, Germany

Abstract

This work is devoted to the investigation of the authors in the field of fabrication of Fresnel lenses and other optical elements with the help of optical methods and registering media on the base of chalcogenide vitreous semiconductors. Developed and investigated are the processes of binary Fresnel lenses fabrication by holographic method, with the consequent transfer of diffraction pattern into the substrate. The results of the investigations of optical elements with blazed profiles fabrication processes are discussed. Most perspective is considered the method of direct recording of optical elements with blazed profiles with the help of sharpfocused laser beam, that enables to obtain kinoform elements with micrometer sizes of distant zones. Methods of additional treatment (wet or dry) enable to obtain the blazed gratings using the initial holographic diffraction gratings with the symmetrical profile, fabricated on the base of chalcogenide layers.

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Alexander V. Stronski, Peter E. Schepeljavi, Sergey A. Kostyukevych, Peter F. Romanenko, Igor Iosifovitc Robur, and Ivan Z. Indutnyi "Fabrication of Fresnel lenses and other optical elements with the help of inorganic resists", Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); https://doi.org/10.1117/12.180953

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