0

Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Linkage design effect on the reliability of surface-micromachined microengines driving a load

[+] Author Affiliations
Danelle M. Tanner, Kenneth A. Peterson, Lloyd W. Irwin, Paiboon Tangyunyong, William M. Miller, William P. Eaton, Norman F. Smith, M. Steven Rodgers

Sandia National Labs. (USA)

Proc. SPIE 3512, Materials and Device Characterization in Micromachining, 215 (September 1, 1998); doi:10.1117/12.324060
Text Size: A A A
From Conference Volume 3512

  • Materials and Device Characterization in Micromachining
  • Craig R. Friedrich; Yuli Vladimirsky
  • Santa Clara, CA | September 20, 1998

abstract

The reliability of microengines is a function of the design of the mechanical linkage used to connect the electrostatic actuator to the drive. We have completed a series of reliability stress tests on surface micromachined microengines driving an inertial load. In these experiments, we used microengines that had pin mechanisms with guides connecting the drive arms to the electrostatic actuators. Comparing this data to previous results using flexure linkages revealed that the pin linkage design was less reliable. The devices were stressed to failure at eight frequencies, both above and below the measured resonance frequency of the microengine. Significant amounts of wear debris were observed both around the hub and pin joint of the drive gear. Additionally, wear tracks were observed in the area where the moving shuttle rubbed against the guides of the pin linkage. At each frequency, we analyzed the statistical data yielding a lifetime (t50) for median cycles to failure and (sigma) , the shape parameter of the distribution. A model was developed to describe the failure data based on fundamental wear mechanisms and forces exhibited in mechanical resonant systems. The comparison to the model will be discussed.

© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Danelle M. Tanner ; Kenneth A. Peterson ; Lloyd W. Irwin ; Paiboon Tangyunyong ; William M. Miller, et al.
"Linkage design effect on the reliability of surface-micromachined microengines driving a load", Proc. SPIE 3512, Materials and Device Characterization in Micromachining, 215 (September 1, 1998); doi:10.1117/12.324060; http://dx.doi.org/10.1117/12.324060


Access This Article
Sign In to Access Full Content
Please Wait... Processing your request... Please Wait.
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
 

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Advertisement


Buy this article ($18 for members, $25 for non-members).
Sign In