High-quality ZnSe on GaAs grown by metalorganic chemical vapor deposition (MOCVD) using diethylzinc (DEZn) and diethyselenide (DESe)

Jyh-Chia Chen; Bing Yang; Alph Fred Semendy; William W. Clark III; Phillip R. Boyd; Neal Bambha

doi:10.1117/12.179654

13 July 1994 High-quality ZnSe on GaAs grown by metal-organic chemical vapor deposition (MOCVD) using diethylzinc (DEZn) and diethyselenide (DESe)

Jyh-Chia Chen, Bing Yang, Alph Fred Semendy, William W. Clark III, Phillip R. Boyd, Neal Bambha

Author Affiliations +

Proceedings Volume 2228, Producibility of II-VI Materials and Devices; (1994) https://doi.org/10.1117/12.179654
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

In this work, we study the growth parameters of ZnSe on GaAs by MOCVD and characterize the epilayers by various techniques. Epilayers were grown using diethylzinc (DEZn) and diethylselenide (DESe) as source materials. Growth studies were done at 400 degree(s)C under different growth conditions in an atmospheric pressure MOCVD reactor. Different DESe to DEZn ratios (from 0.5 to 5) were used to study the effects of VI/II ratio on ZnSe quality. The as-grown ZnSe epilayers were characterized by double crystal x-ray diffraction, transmission electron microscope (TEM), and scanning electron microscope. The results show excellent surface morphology and crystal quality of ZnSe. The best material was grown on undoped GaAs at the VI/II ratio near unity. The full-width-at-half-maximum of ZnSe (approximately 0.5 micrometers thick) x-ray peak as low as 90 arc seconds was achieved. To our knowledge, this is the narrowest peak among the reported results of ZnSe on GaAs. TEM results also show very low defect density. ZnSe epilayer with low stacking faults density (less than 10⁵/cm²) and large spacing between misfit dislocations (approximately micrometers ) were grown on GaAs.

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Jyh-Chia Chen, Bing Yang, Alph Fred Semendy, William W. Clark III, Phillip R. Boyd, and Neal Bambha "High-quality ZnSe on GaAs grown by metal-organic chemical vapor deposition (MOCVD) using diethylzinc (DEZn) and diethyselenide (DESe)", Proc. SPIE 2228, Producibility of II-VI Materials and Devices, (13 July 1994); https://doi.org/10.1117/12.179654

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