Surface defect detection and classification with light scattering

Michael Gebhardt; Horst Truckenbrodt; Bernd Harnisch

doi:10.1117/12.46822

1 October 1991 Surface defect detection and classification with light scattering

Michael Gebhardt, Horst Truckenbrodt, Bernd Harnisch

Proceedings Volume 1500, Innovative Optics and Phase Conjugate Optics; (1991) https://doi.org/10.1117/12.46822
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

The quality of smooth technical surfaces is characterized by the surface roughness and by surface defects. For a stable quality control, objective measuring conditions are necessary. The objective measurement of surface defects especially is an unsolved problem. For the investigation of the scattering characteristics of different surface defects, a measuring device was developed. With this measuring device, the type of defect and the angle dependent scattering intensity were measured and compared with theoretical calculations.

Citation Download Citation

Michael Gebhardt, Horst Truckenbrodt, and Bernd Harnisch "Surface defect detection and classification with light scattering", Proc. SPIE 1500, Innovative Optics and Phase Conjugate Optics, (1 October 1991); https://doi.org/10.1117/12.46822

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