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Proceedings Article

Surface defect detection and classification with light scattering

[+] Author Affiliations
Michael Gebhardt, Horst Truckenbrodt, Bernd Harnisch

Friedrich-Schiller-Univ. (Germany)

Proc. SPIE 1500, Innovative Optics and Phase Conjugate Optics, 135 (October 1, 1991); doi:10.1117/12.46822
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From Conference Volume 1500

  • Innovative Optics and Phase Conjugate Optics
  • Rolf-Juergen Ahlers; Theo T. Tschudi
  • The Hague, Netherlands | March 11, 1991

abstract

The quality of smooth technical surfaces is characterized by the surface roughness and by surface defects. For a stable quality control, objective measuring conditions are necessary. The objective measurement of surface defects especially is an unsolved problem. For the investigation of the scattering characteristics of different surface defects, a measuring device was developed. With this measuring device, the type of defect and the angle dependent scattering intensity were measured and compared with theoretical calculations.

© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Michael Gebhardt ; Horst Truckenbrodt and Bernd Harnisch
"Surface defect detection and classification with light scattering", Proc. SPIE 1500, Innovative Optics and Phase Conjugate Optics, 135 (October 1, 1991); doi:10.1117/12.46822; http://dx.doi.org/10.1117/12.46822


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