Micromachined scanning mirrors for laser beam deflection

Peter Huber; U. Gerlach-Meyer

doi:10.1117/12.46089

1 May 1991 Micromachined scanning mirrors for laser beam deflection

Peter Huber, U. Gerlach-Meyer

Proceedings Volume 1522, Optical Space Communication II; (1991) https://doi.org/10.1117/12.46089
Event: Munich '91 (Lasers '91), 1991, Munich, Germany

Abstract

The monolithic, micromachined devices presently discussed can be used in future satellite payloads to achieve low mass, low volume, and low power consumption requirements associated with pointing-acquisition-tracking purposes in optical free-space communications systems. Such performance parameters as resonance frequency and deflection characteristics can be adjusted through simple variation of the lithographic masks and their processing parameters. The technical feasibility of such monolithic scanners has been demonstrated.

Citation Download Citation

Peter Huber and U. Gerlach-Meyer "Micromachined scanning mirrors for laser beam deflection", Proc. SPIE 1522, Optical Space Communication II, (1 May 1991); https://doi.org/10.1117/12.46089

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