Single and multilayer coatings deposited by laser-assisted electron beam evaporation

Dieter Schaefer; Peter Thomsen-Schmidt; H. Johansen; T. Martini; Bernhard Steiger; G. Pfeifer; Guenter Reisse

doi:10.1117/12.192126

4 November 1994 Single and multilayer coatings deposited by laser-assisted electron beam evaporation

Dieter Schaefer, Peter Thomsen-Schmidt, H. Johansen, T. Martini, Bernhard Steiger, G. Pfeifer, Guenter Reisse

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192126
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Laser assisted electron beam evaporation is a new deposition technique to improve the microstructure of HfO₂ and Y₂O₃ films for optical applications. Major advantages of this method are an increased refractive index, a higher laser damage threshold at 248 nm and reduced absorption compared with films deposited by electron beam evaporation. It is possible to influence the refractive index changing by the laser power and to prepare multilayer like systems containing only one coating material.

Citation Download Citation

Dieter Schaefer, Peter Thomsen-Schmidt, H. Johansen, T. Martini, Bernhard Steiger, G. Pfeifer, and Guenter Reisse "Single and multilayer coatings deposited by laser-assisted electron beam evaporation", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192126

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