Comparison of writing strategies subject to resist heating

Sergey V. Babin

doi:10.1117/12.332875

18 December 1998 Comparison of writing strategies subject to resist heating

Sergey V. Babin

Proceedings Volume 3546, 18th Annual BACUS Symposium on Photomask Technology and Management; (1998) https://doi.org/10.1117/12.332875
Event: 18th Annual BACUS Symposium on Photomask Technology and Management, 1998, Redwood City, CA, United States

Abstract

During electron beam (e-beam) exposure, the temperature of the resist varies locally, causing critical dimension distortion. An experimental comparative study of resist heating at 50 kV for a number of writing strategies was made. Exposure, materials, and processing were equal; the same e-beam column was used, but beam deflection was modified so that raster scanning could be compared to vector scan beam (VSB) exposure at high throughput. These strategies were compared for single- pass and four-pass exposures. Simulations of temperature rise were done using the TEMPTATION (Temperature simulation) software tool. The maximum temperature rise was 38 degrees Celsius for 614-micrometer wide raster exposure, while over 220 degrees Celsius for VSB exposure. Good agreement of simulation and experiment was found. A 16% effective dose change due to resist heating was found at full coverage, single-pass exposure, while in VSB, this value was over 200%. These results indicate that raster writing has an advantage over VSB exposures with regard to resist heating.

Citation Download Citation

Sergey V. Babin "Comparison of writing strategies subject to resist heating", Proc. SPIE 3546, 18th Annual BACUS Symposium on Photomask Technology and Management, (18 December 1998); https://doi.org/10.1117/12.332875

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available