Optimum design of phase gratings for diffractive optical elements obtained by thin-film deposition

Stefano Beretta; Massimo M. Cairoli; Marzia Viardi

doi:10.1117/12.49368

1 November 1991 Optimum design of phase gratings for diffractive optical elements obtained by thin-film deposition

Stefano Beretta, Massimo M. Cairoli, Marzia Viardi

Proceedings Volume 1544, Miniature and Micro-Optics: Fabrication and System Applications; (1991) https://doi.org/10.1117/12.49368
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

A theoretical approach to the design of high efficiency multilevel thin film phase-only gratings is reported. The discussion shows that a film optimum thickness and refraction index must be set in designing DOE components with maximum diffraction efficiency. Experimental results related to the grating''s chromatic behavior vs. the thin film parameters are also presented. These results show good agreement with the expected values foreseen by theory.

Citation Download Citation

Stefano Beretta, Massimo M. Cairoli, and Marzia Viardi "Optimum design of phase gratings for diffractive optical elements obtained by thin-film deposition", Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); https://doi.org/10.1117/12.49368

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