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Proceedings Article

Precision soft x-ray reflectometry of curved multilayer optics

[+] Author Affiliations
Michael K. Krumrey, Mikhael Kuehne, Peter Mueller, Frank Scholze

Physikalisch-Technische Bundesanstalt Berlin (Germany)

Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, 136 (January 1, 1992); doi:10.1117/12.51276
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From Conference Volume 1547

  • Multilayer Optics for Advanced X-Ray Applications
  • Natale M. Ceglio
  • San Diego, CA | July 21, 1991

abstract

In the PTB laboratory at the electron storage ring BESSY flat multilayer mirrors as well as curved multilayer optics are characterized in the soft x-ray region using synchrotron radiation. Precision reflectometry is performed in the spectral range between 5 and 30 nm where the content of higher orders in the monochromatized radiation is below 2%. The existing facilities and current improvements of the instrumentation are described. Examples for spatially resolved measurements of the reflectance of curved multilayer optics are presented.

© (1992) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Michael K. Krumrey ; Mikhael Kuehne ; Peter Mueller and Frank Scholze
"Precision soft x-ray reflectometry of curved multilayer optics", Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, 136 (January 1, 1992); doi:10.1117/12.51276; http://dx.doi.org/10.1117/12.51276


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