Accuracy and repeatability results of OMNISCATR: a high-speed high-resolution three-dimensional scatterometer

Raymond J. Castonguay; Terry D. Ferguson

doi:10.1117/12.189205

7 October 1994 Accuracy and repeatability results of OMNISCATR^TM: a high-speed, high-resolution three-dimensional scatterometer

Raymond J. Castonguay, Terry D. Ferguson

Author Affiliations +

Proceedings Volume 2260, Stray Radiation in Optical Systems III; (1994) https://doi.org/10.1117/12.189205
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

OMNISCATR 1000 is a second generation of a new generation of high resolution three dimensional scatterometers. The instrument can acquire 200,000 three dimensional scatter data points with a dynamic range of 10⁸. A description of OMNISCATR 1000 and its capabilities is presented. Data is also presented showing that the instrument's high speed data acquisition system has a measurement repeatability of 2.5%.

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Raymond J. Castonguay and Terry D. Ferguson "Accuracy and repeatability results of OMNISCATR^TM: a high-speed, high-resolution three-dimensional scatterometer", Proc. SPIE 2260, Stray Radiation in Optical Systems III, (7 October 1994); https://doi.org/10.1117/12.189205

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