Fabrication and testing of a silicon immersion grating for infrared spectroscopy

Paul J. Kuzmenko; Dino R. Ciarlo; Charles G. Stevens

doi:10.1117/12.187593

30 September 1994 Fabrication and testing of a silicon immersion grating for infrared spectroscopy

Paul J. Kuzmenko, Dino R. Ciarlo, Charles G. Stevens

Proceedings Volume 2266, Optical Spectroscopic Techniques and Instrumentation for Atmospheric and Space Research; (1994) https://doi.org/10.1117/12.187593
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

recent advances in silicon micromachining techniques allow the fabrication of very coarse infrared echelle gratings. When used in immersion mode the dispersion is increased proportionally to the refractive index. This permits a very significant reduction in the overall size of a spectrometer while maintaining the same resolution. We have fabricated a right triangular prism from silicon with a grating etched into the face of the hypotenuse. The grating covers an area of 32 mm by 64 mm and has a 97.5 micrometers periodicity with a blaze angle of 63.4 degree(s). The groove surfaces are very smooth with a roughness of a few nm. Random defects in the silicon are the dominant source of grating scatter. We measure a grating ghost intensity of 1.2%. The diffraction peak is quite narrow, slightly larger than the Airy disc diameter at F/12. However, due to wavefront aberrations, perhaps 15-20% of the diffracted power is in the peak with the rest distributed in a diameter roughly five times the airy disc.

Citation Download Citation

Paul J. Kuzmenko, Dino R. Ciarlo, and Charles G. Stevens "Fabrication and testing of a silicon immersion grating for infrared spectroscopy", Proc. SPIE 2266, Optical Spectroscopic Techniques and Instrumentation for Atmospheric and Space Research, (30 September 1994); https://doi.org/10.1117/12.187593

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available