Cost-effective fabrication of optical components using sub-nanometer closed-loop control of the polishing surface shape

Max I. Robertson; Peter Barrie

doi:10.1117/12.57740

1 April 1992 Cost-effective fabrication of optical components using sub-nanometer closed-loop control of the polishing surface shape

Max I. Robertson, Peter Barrie

Author Affiliations +

Proceedings Volume 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level; (1992) https://doi.org/10.1117/12.57740
Event: SIRA, 1991, London, United Kingdom

Abstract

Long term investigation into the production of optically flat, low damage surfaces has shown that the most time consuming part of the process is mechanically wear conditioning the polishing surface so that it produces the desired shape on the sample. A completely new concept in polishing systems has been produced which enables the operator to make precise changes to the polishing plate surface shape in resolution steps ranging from 50 nanometers over a 100 mm diameter sample to sub-nanometer increments for a sample of 10 mm diameter.

Citation Download Citation

Max I. Robertson and Peter Barrie "Cost-effective fabrication of optical components using sub-nanometer closed-loop control of the polishing surface shape", Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); https://doi.org/10.1117/12.57740

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