Pneumatic method for making fast, higher resolution, noncontacting measurement of surface topography

Ronald W. Woolley

doi:10.1117/12.57764

1 April 1992 Pneumatic method for making fast, higher-resolution, noncontacting measurement of surface topography

Ronald W. Woolley

Proceedings Volume 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level; (1992) https://doi.org/10.1117/12.57764
Event: SIRA, 1991, London, United Kingdom

Abstract

Fluid Film Devices Ltd specialises mainly in the design and manufacture of self-acting or aerodynamic gas bearings. The geometric tolerances needed for these bearings can be of the order of O.lum. It was the need for rapid, noncontacting measurement of components, often made of ceramic material, that led to the re-development of the Pneumatic Probe (PP).

Citation Download Citation

Ronald W. Woolley "Pneumatic method for making fast, higher-resolution, noncontacting measurement of surface topography", Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); https://doi.org/10.1117/12.57764

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