Microelectromechanical systems using piezoelectric thin films

Dennis L. Polla; P. J. Schiller; L. F. Francis

doi:10.1117/12.190900

21 October 1994 Microelectromechanical systems using piezoelectric thin films

Dennis L. Polla, P. J. Schiller, L. F. Francis

Proceedings Volume 2291, Integrated Optics and Microstructures II; (1994) https://doi.org/10.1117/12.190900
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Ferroelectric thin films have been integrated with silicon-based microelectromechanical systems, commonly called MEMS. Several thin films of the PZT family have been used in the formation of both microsensors and microactuators in processes compatible with silicon nitride, surface-micromachined, membranes and analog CMOS technology. Back-end micromachining of MEMS structures based on PZT-type electroceramic thin films is described. Several ferroelectric MEMS examples are described including (1) cantilever beam micro- accelerometer, (2) acoustic pressure sensor, (3) uncooled pyroelectric infrared imaging array, (4) integrated acoustic sensor, (5) micro- positioner, and (6) simple cantilever flap actuators. Major issues of merging technologies with ferroelectric thin films with microelectromechanical structures and on-chip electronics are described.

Citation Download Citation

Dennis L. Polla, P. J. Schiller, and L. F. Francis "Microelectromechanical systems using piezoelectric thin films", Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); https://doi.org/10.1117/12.190900

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