Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans

Hendrik Rothe; Dorothee Hueser; Andre Kasper; Thomas Rinder

doi:10.1117/12.343705

29 March 1999 Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans

Hendrik Rothe, Dorothee Hueser, Andre Kasper, Thomas Rinder

Author Affiliations +

Proceedings Volume 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays; (1999) https://doi.org/10.1117/12.343705
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

For quality inspection of polished surfaces as applied in semiconductor and optical industry, various methods are used for a fast detection of microroughness, defects, and contaminations. With the aid of stray light sensors the intensity distribution of the reflected and scattered light, i.e. the BRDF, is measured. The probability distribution of values of a BRDF is parametrized to obtain a measure for roughness and for classes of defects. There is still need for justifying the choice of statistical moments to characterize and finally to classify different surfaces. Of course, a basic quantitative, i.e. metrological understanding of stray light sensors is necessary. The power spectrum of surface topographies sufficiently smooth to obey Rayleigh-Rice approximation is proportional to the BRDF. Therefore a comparison was only carried out with sample surfaces obeying this approximation. Defects and contaminations with lateral sizes smaller than the wavelength of the illuminating light employed in the stray light sensor, however, could not be analyzed within this investigation. We have measured the topography of large areas up to 600 micrometer X 100 micrometer with an AFM by patching several scans (up to 8) with overlap. BRDFs evaluated from AFM measurements agree well with BRDFs measured with a stray light sensor.

Citation Download Citation

Hendrik Rothe, Dorothee Hueser, Andre Kasper, and Thomas Rinder "Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans", Proc. SPIE 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, (29 March 1999); https://doi.org/10.1117/12.343705

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available