Integration of red, infrared, and blue light sources by wafer fusion

Philip D. Floyd; Christopher L. Chua; David W. Treat; David P. Bour

doi:10.1117/12.344532

1 April 1999 Integration of red, infrared, and blue light sources by wafer fusion

Philip D. Floyd, Christopher L. Chua, David W. Treat, David P. Bour

Proceedings Volume 3628, In-Plane Semiconductor Lasers III; (1999) https://doi.org/10.1117/12.344532
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

In this work, we demonstrate fusion of GaAs-based laser structures to GaN-based light-emitting diode (LED) heterostructures. Successful operation of red and infrared lasers fused to functioning GaN LEDs is achieved. A single heterostructure consisting of AlGaInAs/AlGaAs quantum well (QW) and GaInP/AlGaInP QW laser diode structures was grown by low-pressure organometallic vapor phase epitaxy (OMVPE) on GaAs substrates. The GaN LED structure was grown by OMVPE on an A-face sapphire substrate. The heterostructures were fused at 650 degrees Celsius in an H₂ ambient, while under uniaxial pressure. To fabricate the lasers, the GaAs substrate was selectively etched, leaving the red and infrared QW laser stack structure on GaN. Ridge waveguide QW lasers and GaN LEDs were fabricated with the fused epilayers. Infrared, AlGaInAs QW lasers (4 X 500 micrometer), operated with a threshold current (I_th) of 40 mA and external differential quantum efficiency ((eta) _d) of 11.5%/facet at about 821 nm. Red, GaInP QW lasers (4 X 500 micrometer), operated with a I_th of 118 mA and (eta) _d of 18.7%/facet at about 660 nm. The adjacent InGaN/GaN LED emitted at 446 nm.

Citation Download Citation

Philip D. Floyd, Christopher L. Chua, David W. Treat, and David P. Bour "Integration of red, infrared, and blue light sources by wafer fusion", Proc. SPIE 3628, In-Plane Semiconductor Lasers III, (1 April 1999); https://doi.org/10.1117/12.344532

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available